Welcome to Japans' number one company of OZONE technology.

Ozone generator for research and development.

Our small-sized company, EcoDesign, Inc. based in Japan has specialized in developing and manufacturing ozone generators for last ten years. We are providing ozone generators and ozone related technological supports you need. The goal of our mission is to contribute to societies through out the world creating sustainable systems for mankind.

Let us introduce our ozone generators specially designed for research use that features:
You can obtain high concentration ozone gas with various flow rates;
Output ozone gas is almost contamination free (Good for semiconductor clean up process);
Generators are compact and portable.

You will find out our products give you the best results in your research with great satisfaction. We are sure that our ozone technology will continue to evolve, and our products will be recognized as vital tools to explore exciting world of science.
Features

Ozone generators designed for all of ozone researchers

Ozone, originated from oxygen and goes back to oxygen, is useful and environmentally friendly. The gas has unlimited ways of use for innovation in our living space such as water purification. Ozone can play very important role in solving many environmental problems. The enthusiasm and constant efforts of ozone-research pioneers will lead the way to the various applications of ozone. Our ozone generators of R&D series, with the following three features will surely assist your reseach.

The first: The ozone generated is free from contamination.

The discharge tubes, totally made of quartz glass, eliminate sputtering by discharges. Generated ozone is clean enough, and is suitable for precision cleaning processes such as semi-conductor-cleaning. Free-of-metal-parts models are also available upon requests.

The second: Highly concentrated ozone gas is available.

Discharge tubes with well designed gaps and length, coupled with efficient cooling system efficiently generate highly concentrated ozone. Water-cooled model can achieve the concentration up to 220 g/m3 (approximately 10 vol%). The range of your research will be greatly expanded.

Corona discharge viewed in our discharge tube

Corona discharge viewed in our discharge tube

The third: Highly stable ozone concentration is achieved.

The R&D models equipped with running water-cooling systems, cooling both inner and outer walls of gas conduits in discharge tubes, can generate ozone at stable concentration. The system also is robust against environmental temperature fluctuations. You can resume the same concentration with high precision in your experiments without difficulties.
Ozonated Water Generators

Metal-free circulation type ozonated water generator OWF-C series
OWF-C5L30P

Using radiator for cooling water. Small size, light weight. No need external supply cooling water.

 High concentration ozonated water of 60 ppm (OWF-C5L30P). Suitable for single wafer cleaning process.
Built-in ultraviolet type ozone monitor.
Ozone concentration in water Max 60 ppm (OWF-C5L30P)
Max 80 ppm (OWF-C30L30P)		 Flow rate of water Max 7 L/min (OWF-C5L30P)
Max 50 L/min (OWF-C30L30P)
Discharge tube cooling method Radiator circulating water cooling Power consumption 1 kW (OWF-C5L30P)
Weight 87 kg (OWF-C5L30P) External dimensions 611W x 590D x 1317H mm (OWF-C5L30P)
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Metal-free ozonated water generator OWF series
OWF-10L20P

No need external supply cooling water. Built-in ultraviolet type ozone monitor.

 Produces metal contamination-free ozonated water that can be used for semiconductor cleaning.
Ozone concentration in water Max 20 ppm (OWF-10L20P)
Max 25 ppm (OWF-5L25P)		 Flow rate of water Max 10 L/min (OWF-10L20P)
Max 5 L/min (OWF-5L25P)
Discharge tube cooling method Radiator circulating water cooling Power consumption 1 kW
Weight 50 kg External dimensions 450W x 550D x 865H mm
Ozone Generators

Ozone Generator for R&D LOG-LC15G
LOG-LC15G

You get clean ozone gas at max 15 g per hour with metal contamination free.

 Standard model for R&D.
High ozone concentration, 200 g per m3, is achieved in your research.
Ozone output Max 15 g/h (5 L/min) Ozone concentration Max 200 g/m3 (0.5 L/min)
Discharge tube cooling method Running water (both innner & outer walls) cooling Power consumption 280 W
Weight 7.5 kg External dimensions 280W x 230D x 270H mm

Ozone Generator FOG-AC5G
FOG-AC5G

Very compact metal contamination free ozone generator, equipped with air-cooled discharge tube, produces ozone with high concentration.

 Air-cooled ozone generator. You only need to feed oxygen and plug it into the power source to get ozone with high concentration.
Ozone output Max 5 g/h (5 L/min) Ozone concentration Max 50 g/m3 (0.5 L/min)
Discharge tube cooling method Air-cooled Power consumption 150 W
Weight 5 kg External dimensions 180W x 220D x 260H mm

Ozone Generator Module UOG-LC40G
UOG-LC40G

Compact ozone generator module. You get metal free ozone gas at max 40 g per hour.

 By adding units, you get increasing in ozone amounts. For example, named LOG-LC160G, connected four this UOG-LC40G units, has an ozone output amount of 160 g per hour.
Ozone output Max 40 g/h (10 L/min) Ozone concentration Max 200 g/m3 (0.5 L/min)
Discharge tube cooling method Running water (both innner & outer walls) cooling Power consumption 800 VA
Weight 11 kg External dimensions 280W x 200D x 496H mm
LOG-LC160G

LOG-LC160G (Ozone output: Max 160 g/h)
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What's New
  • September 12, 2017: Products leaflet updated.
  • September 11, 2017: Products information updated.
  • September 10, 2017: Always-On SSL/TLS compliant.
  • April 10, 2017: Relaunched this website.